JPH0357930U - - Google Patents

Info

Publication number
JPH0357930U
JPH0357930U JP11907789U JP11907789U JPH0357930U JP H0357930 U JPH0357930 U JP H0357930U JP 11907789 U JP11907789 U JP 11907789U JP 11907789 U JP11907789 U JP 11907789U JP H0357930 U JPH0357930 U JP H0357930U
Authority
JP
Japan
Prior art keywords
oxide superconductors
burner
tube burner
oxide
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11907789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11907789U priority Critical patent/JPH0357930U/ja
Publication of JPH0357930U publication Critical patent/JPH0357930U/ja
Pending legal-status Critical Current

Links

JP11907789U 1989-10-11 1989-10-11 Pending JPH0357930U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11907789U JPH0357930U (en]) 1989-10-11 1989-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11907789U JPH0357930U (en]) 1989-10-11 1989-10-11

Publications (1)

Publication Number Publication Date
JPH0357930U true JPH0357930U (en]) 1991-06-05

Family

ID=31667218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11907789U Pending JPH0357930U (en]) 1989-10-11 1989-10-11

Country Status (1)

Country Link
JP (1) JPH0357930U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06244120A (ja) * 1993-02-19 1994-09-02 Sony Corp ウエハ処理装置におけるガス供給装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06244120A (ja) * 1993-02-19 1994-09-02 Sony Corp ウエハ処理装置におけるガス供給装置

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